Chemistry

Resource responsible:

Laurent ROBERT
03 81 66 66 47
lrobert [at] femto-st.fr
Personal page: https://www.femto-st.fr/fr/personnel-femto/laurentrobert



Ni Electroplating system

Technotrans Microform 100 - view the equipment
> Hard mask for etching
> Items in nickel
> Vias filling

Hydrofluoric Acid Bench

Idonus HF VPE-100 - view the equipment
> SiO2 and Ti etching
> Vapor HF Etching