Deposition / Furnaces

Resource responsible:

Cyril MILLON
03 81 66 63 02
cyril.millon [at] femto-st.fr

Personal page: https://www.femto-st.fr/fr/personnel-femto/cyrilmillon



Cathode reactive sputtering system

Plassys MP 450S - view the equipment
> Metal, Oxide & Nitride deposition

DC magnetron sputtering system

Plassys MP 500 - view the equipment
> Metal deposition

DC sputtering system

Plassys MP 700S - view the equipment
> Metal deposition

Electron-Beam evaporator

Plassys MEB 600 - view the equipment
> Metal & Oxide deposition for lift-off processes

ICPECVD

Sentech SI 500D - view the equipment
> Oxide & Si3N4 deposition
> Good conformal deposition

Electron-Beam evaporator

Alliance Concept EVA 450 - view the equipment
> Metal deposition for lift-off processes

Oxidation and Annealing furnace

AET - view the equipment
> Thermal oxidation & diffusion

Rapid thermal processing

Annealsys AS-Premium RTP - view the equipment
> Densification & Crystallization
> Contact annealing