Project NEXT
Nouveaux Equipements technologiques et auXiliaires pour les micro-nanoTechnologies
> Development and improvement of our research, innovation capabilities and our cutting-edge technologies.
The NEXT project (FEDER) was developed within the framework of Bourgogne-Franche-Comté’s strong commitment to enhancing its research and innovation capabilities. Such improvements often rely on the deployment of cutting-edge technologies within the region.
Consequently, the FEMTO-ST MIMENTO platform has identified technological requirements that address regional expectations. This will help fulfill several key objectives, such as boosting the international visibility and attractiveness of both public and private research in Bourgogne-Franche-Comté, while attracting new researchers and engineers to the area.
The project is structured around two distinct yet interdependent axes:
- Investment in state-of-the-art micro and nano-fabrication equipment to scale up and strengthen the international micro-fabrication capabilities of the FEMTO-ST MIMENTO platform.
- Upgrading the cleanroom infrastructure by incorporating energy efficiency goals, which are essential for the long-term sustainability of the research platform.
Project objectives:
To contribute to the structuring of regional research and introduce new technological development activities focused on emerging and strategic national priorities.
To strengthen the core scientific pillars of the MIMENTO facility at a national level.
To reduce MIMENTO’s environmental footprint.
> Key project data:
Project Leader | "Centre-Est" CNRS Office |
Project duration | 3 year (01/11/2023 to 31/12/2026) |
Overall budget | 4 098 913 € |
FEDER Funding | 66% or 2 691 860 € |
PEPR Electronic Funding | 27% or 1 107 053 € |
Equipex+ Funding | 7% or 300 000 € |
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Action 1: Enhancing Shared Micro- and Nano-fabrication Capabilities at the FEMTO-ST MIMENTO Platform through New Equipment Investment.
Equipment | Investment Objectives |
FIB Velion Raith | To increase nano-fabrication and nano-characterization capacity |
XPS Thermofischer | To enable elementary physico-chemical surface and depth profile analysis |
MRF QED Technologies | To introduce a new localized polishing capability with high optical quality |
Flip-Chip | To improve chip assembly precision |
Disco Technologies Dicing Saw | To strengthen chip dicing capabilities following cleanroom fabrication |
The integration of these new capabilities within the MIMENTO platform aims to stimulate research at FEMTO-ST and foster academic and industrial partnerships. In this regard, the investment in these five next-generation tools positions the Next project as a catalyst for technical renewal, ensuring a leading role for the MIMENTO platform and FEMTO-ST within international micro-technology research.
For more details on Action 1, click [HERE].
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Action 2: Fit-out and Renovation of our 865 m² Cleanroom aimed at reducing energy impact and modernizing infrastructure.
Planned Works | Electricity savings vs. 2019 baseline |
1st phase of works (2023-2024) (Non-FEDER funded) | 12% |
Project NEXT FEDER | 20% |
New cooling unit with energy recovery (UMLP building) | 5 % |
Energy recovery loop on both cooling units | 8,7% |
Extraction system improvements (variable) | 4,5% |
Airflow control (UMLP building) | 1,8% |
TOTAL | 32% |
The first phase of work allowed us to validate the measures for the FEDER program. Together, these two actions target an estimated total saving of approximately 30% compared to 2019 consumption levels. The goal of reducing MIMENTO’s energy impact will be made possible through FEDER funding.
This objective of energy efficiency and environmental footprint reduction remains a priority for the MIMENTO platform. Consequently, future projects and discussions are already underway. These perspectives confirm that the Next project serves as the foundation for a sustainable strategy, aiming to transform current energy challenges into a genuine driver of excellence for the MIMENTO platform and FEMTO-ST.