Wet chemistry

Resource contact:

Laurent ROBERT
03 81 66 66 47
lrobert [at] femto-st.fr
Personal page: https://www.femto-st.fr/fr/personnel-femto/laurentrobert
Marion VIEIRA
03 63 08 26 56
marion.vieira [at] femto-st.fr
Personal page: https://www.femto-st.fr/fr/personnel-femto/marionvieira

 

Hydrofluoric Acid Bench

Idonus
HF VPE-100
Use:
> SiO2 and Ti etching
> Vapor HF Etching
Technical specifications

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Ni Electroplating system

Technotrans
Microform 100
Use:
> Hard mask for etching
> Items in nickel
> Vias filling
Technical specifications

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Chemical benches

Acid bench
Base bench
Solvents bench
Use:
> Metals wet etching
> Silicon wet etching
> Photoresist stripping
> Substrates cleaning

Technical specifications (Acid & solvent bench)

Technical specifications (KOH bench)