Main Building
Temis Innovation Building
Lithography | ![]() |
Nanotechnology | ![]() |
Thin film technology | ![]() |
Dry etching | ![]() |
Wet chemistry | ![]() |
Integration / Packaging | ![]() |
Dicing / Polishing | ![]() |
3D laser microfabrication | ![]() |
Process characterization | ![]() |
Industrial line | ![]() |